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Hitachi

Hitachi High-Technologies in Canada

This paper introduces a technology breakthrough: atomic resolution secondary electron imaging has been realized, for the first time, on Hitachi 200-300 kV STEM/SEM and TEM/STEM/SEM correlative electron microscopes. Interior and surface structures of materials can now be imaged at atomic resolution simultaneously. This breakthrough opens a wide variety of applications in materials science, nanoscience, and semiconducting metrology.