Skip to main content

Hitachi

Hitachi High-Technologies in Canada

Fluorescent X-ray (XRF) Coating Thickness Gauge FT110A

The FT110A XRF Coating Thickness Gauge has a new auto focus function which automatically focuses on the sample to acquire optical image within a few seconds. No manual adjustment is required, which results in higher throughput.

Features

Easy operation

Once a sample is placed on the stage, an optical image of the sample is automatically displayed.

Precisely measures 50 nm Au coating thickness in 10 seconds

Optimum geometry provides higher sensitivity even under a micro beam, enabling higher measurement accuracy with a round 0.1 or 0.2 mm collimator.

Measurement without the standard sample

Measurement can be done without thickness standard sample(s) by expanding the FP software. Measurement of multilayer film and alloy film can be performed easily.

Easy positioning using the Wide View System (option)

With the new Wide View System (option), the whole sample image can be observed (size max. 250x200 mm) and the desired measurement area can be specified.

Specifications

Specifications
TypeFT110A
Elements Atomic Numbers 22(Ti) to 83(Bi)
X-ray source Air-cooled small X-Ray Tube
Voltage : 50 kV
Current:1 mA
Detector Proportional Counter
Collimator Round. 0.1 mm, 0.2 and two other types
Sample Observation CCD camera (with wide view system)
Sample image focus Laser Pointer
Filter Primary filter automatic switching
Sample Stage [Stage size] 500(W)×400(D)×150(H) mm
[Traveling] X : 250 mm, Y : 200 mm
Controller Desktop Computer with 19 inch LCD Monitor
Application Software Thin Film FP (All types of thin films: Max 5 layers,10 elements per layer), Calibration
Data Process Microsoft Excel, Microsoft Word
Safety Functions Sample door interlock, Sample crash prevention mechanism, Diagnostic Function

Options

  • Mapping software
  • Bulk FP method (Material component analysis)
  • Bulk Calibration method (Coating solution analysis)
  • * "Microsoft", "Excel" and "Word" are registered trademarks of Microsoft Corporation in the United States and other countries.