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Hitachi High-Technologies in Canada

Hitachi FT110 Series XRF Coating Thickness Gauge

Auto focus for better and faster image acquisition


The FT110 Series XRF Coating Thickness Gauge has a new auto focus function which automatically focuses on the sample within a few seconds. No manual adjustment is required, which results in higher throughput.


1. Easy operation

Once a sample is placed on the stage, an optical image of the sample is automatically displayed.

2. Precisely measures 50 nm Au plating thickness in 10 seconds

Optimum geometry provides higher sensitivity even under a micro beam, enabling higher measurement accuracy with a round 0.1 or 0.2 mm collimator.

3. Measurement without standard samples

Measurement can be done without thickness standard sample(s) by expanding the FP software. Measurement of multilayer films and alloy films can be performed easily.

4. Easy positioning using the Wide View System (option)

With the new Wide View System (option), the whole sample image can be observed (size max. 250x200mm) and the desired measurement area can be specified.


ELEMENTS Atomic Numbers 22(Ti) to 83(Bi)
X-RAY SOURCE Air-cooled small X-Ray Tube
Voltage: 50kV
Current: 1mA
DETECTOR Proportional Counter
COLLIMATOR Round. 0.1mm, 0.2 and two other types
SAMPLE OBSERVATION CCD camera (with wide view system)
FILTER Primary filter automatic switching
SAMPLE STAGE Stage Size: 500(W) x 400(D) x 150(H)mm
Travelling: X:250mm, Y:200mm
CONTROLLER Desktop Computer with 19 inch LCD Monitor
APPLICATION SOFTWARE Thin Film FP (All types of thin films: Max 5 layers,10 elements per layer), Calibration
DATA PROCESSING Microsoft® Excel, Microsoft® Word
SAFETY FUNCTIONS Sample door interlock, Sample crash prevention mechanism, Diagnostic Function
  • Mapping software
  • Bulk FP method (Material component analysis)
  • Bulk Calibration method (Coating solution analysis)
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