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Hitachi High-Technologies in Canada

Optional Accessory for Tabletop Microscope TM3030/TM3000 3D-VIEW

This software acquires three dimensional information on a sample by using BSE signal, displays bird's-eye view and three dimension display, and enables the height measurement of the sample.


  • Three-dimensional image can be rotated or zoomed in by mouse control.
  • Three-dimensional image is available without tilting a sample or worrying about image shift since the 3D-VIEW utilizes the signal detected by Quad BSE detector which has 4 elements in 4 directions.
  • Distance in height between 2 points and simple surface roughness can be measured from sectional profile.
  • hree-dimensional image screen can be recorded in animation file (AVI format).


Import function Automatic select and read function of four elements image data(Equipped with automatic SEM condition acquisition function)
Measurement performance Depth accuracy ± 20%(Reference)
Measurement performance is different depending on calibration accuracy, the condition of the kind of the specimen, the observation mode, and the observation condition.
Detectable angle range: ±50 (Reference)
(Observation condition: Standard mode)
Unavailable in the combination of "Charge-up reduction mode" and "5 kV mode".
Measurement function Section profile display
Calibration function (X/Y, Z and Flat)
Distance of X and Y, length and angle measurement between two points specified on the image
Surface area measurement
Distance of X and Y, length and angle measurement between two points specified on section profile
Surface roughness measurement on section profile
Depth direction zoom-in function in section profile display
Base line correction function (straight line and curved line)
Bird's-eye view display
Color contour line display
Three-dimensional display function Rotation and zoom-in Animation record function of observation screen (AVI file)
PC OS Windows® 7 Professional
:A steep topographical surface that exceed detectable angle might not be displayed accurately.