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This software acquires three dimensional information on a sample by using BSE signal, displays bird's-eye view and three dimension display, and enables the height measurement of the sample.
|Import function||Automatic select and read function of four elements image data(Equipped with automatic SEM condition acquisition function)|
|Measurement performance||Depth accuracy ± 20%(Reference)
Measurement performance is different depending on calibration accuracy, the condition of the kind of the specimen, the observation mode, and the observation condition.
Detectable angle range: ±50 (Reference)
(Observation condition: Standard mode)
Unavailable in the combination of "Charge-up reduction mode" and "5 kV mode".
|Measurement function||Section profile display
Calibration function (X/Y, Z and Flat)
Distance of X and Y, length and angle measurement between two points specified on the image
Surface area measurement
Distance of X and Y, length and angle measurement between two points specified on section profile
Surface roughness measurement on section profile
Depth direction zoom-in function in section profile display
Base line correction function (straight line and curved line)
Bird's-eye view display
Color contour line display
|Three-dimensional display function||Rotation and zoom-in Animation record function of observation screen (AVI file)|
|PC OS||Windows® 7 Professional|