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Hitachi

Hitachi High-Technologies in Canada

S-3700 VP-SEM

The S-3700N's huge sample chamber accommodates a variety of samples, while the flexible chamber design affords superior analytical analysis. Capable of accommodating a 300-mm diameter sample with a maximum height of 110 mm. A 5-axis motorized stage makes the large chamber ideal for a wide variety of samples.

Overview

  • Ultra large chamber and large stage traverse - Specimen size: 300mm in diameter and 110 mm in height at analytical working distance of 10mm
  • Computer Eucentric stage with 5axes motorization—X,Y: 150mm x 110 mm; Tilt: -20/+90 degrees
  • Versatile port layout: two ports for EDS, one port for WDS, and one port for EBSD. Six additional ports for a variety of optional accessories
  • Standard low-vacuum mode for non-conductive sample imaging without preparation
  • Economical and ecological design with TMP as standard; no cooling water required; 34% less electrical power consumption and 27% smaller footprint than conventional model

The S-3700N features an ultra large specimen chamber and stage to allow observation of specimens at diameters up to 300mm. Hitachi Variable Pressure SEM (VP-SEM) series have been received with high reputation from customers around the world. They feature low vacuum observation method (6 – 270 Pa) which enables observation of non-conductive samples like electronic components, and water containing samples such as cultured cells, without any sample preparation.
The 3700N's stage has a wide traverse range for observation of sample areas over 200mm in diameter and 110mm in height. Moreover, simultaneous attachments for EDX, WDX, and EBSP analyses are possible at optimized analitical geometry. Electron optics and operational functions follow the specification of the S-3400N.

Specifications

Resolutionin SE Imaging (HighVacuum Mode) 3.0nm @30kV
Resolution in BSE Imaging (Low Vacuum Mode) 4.0nm @30kv
Accelerating Voltage 0.3 - 30kV
Magnification 5x - 300,000x
Specimen Stage (X,Y and Tilt) 150mm x 110mm, -20/ 90 degrees
Maximum Specimen Size and Height 300mm diameter; 110mm (WD=10mm)
Other Computer eucentric stage with 5-axes motorization with navigation software;
5-segment retractable BSED for topt, compo and 3D and TV observation; utilizes same GUI as S-3400N for toolset continuity;
integrated PCI Relationship Database and advanced image processing;
dual image display with signal mixing