Skip to main content

Hitachi

Hitachi High-Technologies in Canada

Scanning Electron Microscope SU3500

Innovative electron source and detectors give superior imaging and analytical performance. Hex bias technology delivers high brightness at low accelerating voltages and the ultra variable-pressure detector is optimized for imaging surface at low pressures. The SU3500 is sure to be the workhorse in any laboratory.

Overview

The SU3500 Scanning Electron Microscope features innovative electron optics and signal detection systems to provide unparalleled imaging and analytical performance. Designed with intuitive logic, the new user-friendly GUI provides comprehensive image observation and display functions. Engineered for a wide range of applications including biological specimens and advanced materials, the SU3500 is sure to be the workhorse microscope in any laboratory.

Unparalleled Image Quality

All new electron optics design with best-in-class image sharpness. 7 nm SE Image Resolution at 3 kV, 10 nm BSE Image resolution at 5 kV.

Intuitive Operation

Wide-screen GUI and fast auto image optimization functions (7 seconds) via "delegation" technology.

Ultra Variable-Pressure Detector

Image surface information at low vacuum and low accelerating voltages.

Stereoscopic Image Function

Point and click for seamless, real-time "3D" image observation.

5-axis Motor Drive Stage

4-axis Motor Drive Stage

The electron optics design yields unmatched imaging performance, achieving high resolution at low accelerating voltages.

Gold particles on Carbon SE
Accelerating Voltage : 3 kV
Secondary Electron (SE) Image
Magnification : 40,000x
Resolution : 7 nm

Gold particles on Carbon BSE
Accelerating Voltage : 5 kV
Backscattered Electron (BSE) Image
Magnification : 30,000x
Resolution : 10 nm

 

Unique live signals can be mixed and displayed as a combined live image.

Features

Fast Auto Imaging

"Best-in-class" Auto Start Functions (Focus, Brightness, Contrast, and Stigmation) for unmatched operational ease and efficiency.

Low kV and Low Vacuum Performance

The Hitachi "Hex-Bias" probe current optimization technology combined with the all new Ultra Variable-Pressure (UVD) detector offers superior imaging and surface information at low accelerating voltages and low vacuum conditions.


Sample : Vinca (Periwinkle)
Vacuum : 3.0 kV
Magnification : 190x
Pressure : 60 Pa
Signal : Ultra Variable-Pressure Detector (UVD)


Sample : Thread sealing tape (extended)
Accelerating Voltage : 3 kV
Vacuum : 30 Pa
Magnification : 10,000x
Signal : Ultra Variable-Pressure Detector (UVD), Without metal coating

Live Stereoscopic Imaging

Our advanced tilted-beam-scan technology enables point and click, real-time "3D" image observation (show 3D pictures from flyer).


Sample : Crustacea
Vacc : 15 kV
Magnification : 100x
Signal : Backscattered Electron (BSE)


Sample : Brass Fracture
Vacc : 15 kV
Magnification : 5,000x
Signal : Secondary Electron (SE)


Sample : Textile
Accelerating Voltage : 5 kV
Vacuum : 50 Pa
Magnification : 100x
Signal : Ultra Variable-Pressure Detector (UVD)


Sample : Rat intestine (Replica)
Accelerating Voltage : 5 kV
Magnification : 350x
Signal : Secondary Electron (SE)
Sample courtesy : Ms. Noriko Nemoto, Bio-imaging Center, Kitasato University

 

Application Data

Semiconductors

PCB Cross-section


Accelerating Voltage : 5 kV
Vacuum : 30 Pa
Magnification : 150x
Signal : BSE, With metal coating


Accelerating Voltage : 3 kV
Vacuum : 20 Pa
Magnification : 5,000x
Signal : BSE, With metal coating

Point of View
Composition contrast is observable throughout the assembly above left and grain contrast of Cu on right image

Materials Science

ZnO


Accelerating Voltage : 5 kV
Magnification : 30,000x
Signal : SE, Without metal coating

Titanium Oxide Particle


Accelerating Voltage : 3 kV
Magnification : 15,000x
Signal : SE, Without metal coating
Sample : Courtesy of Prof. Masato Kakihana, Tohoku University

Point of View
A 50 nm diameter particle (arrowed) on the surface can be clearly observed at a low accelerating voltage of 5 kV.

Point of View
A 50 nm needle-like structure can be clearly observed at a low accelerating voltage of 3 kV.

Tablet (Confectionery)


Accelerating Voltage : 1.5 kV
Magnification : 10,000x
Signal : SE, Without metal coating

Filler (Glass fibers) in Resin


Accelerating Voltage : 1 kV
Vacuum : 50 Pa
Magnification : 1,000x
Signal :BSE, Without metal coating

Point of View
A low beam dose for less sample damage at an accelerating voltage of 1.5 kV.

Point of View
Glass fiber that is susceptible to negative charging is clearly observed at a very low accelerating voltage of 1.0 kV.

Gold-Isocyanide Complex


Accelerating Voltage : 0.8 kV
Magnification : 2,100x
Signal : SE, Without metal coating

Thread sealing tape


Accelerating Voltage : 3 kV
Vacuum : 30 Pa
Magnification : 10,000x
Signal : UVD, Without metal coating

Point of View
The microstructure of the ultra-thin surface is clearly observed at a very low accelerating voltage of 0.8 kV.

Point of View
Stretched and bent fibers are clearly observed under low-vacuum conditions.

Life Sciences

Helicobacter bills


Accelerating Voltage : 2 kV,
Magnification : 17,000x
Signal : SE, With OsO4 coating
Sample courtesy : Prof. Yoshiaki Kawamura, Aichigakuin University

Bacteria


Accelerating Voltage : 1 kV
Vacuum : High
Magnification : 10,000x
Signal : SE (Ionic liquid treated)

Point of View
The twisted structure and flagellum are clearly observed at a very low accelerating voltage of 2 kV.

Point of View
Lactic bacteria is cultivated on agar media that is observed easily with the use of ionic liquid.