Skip to main content
Analytical FE-SEM combines the field-proven stability, high current, and brightness with ultra-high resolution required for a multitude of analytical applications. The Duo-objective Lens designed with a semi-in-lens optics provides capabilities for a wide range of applications that require high-resolution image observation and analysis. The SU-70 offers a industry-leading technology, quality, and reliability.
This newest scanning electron microscope (SEM) from Hitach High Technologies can perform ultra-high resolution imaging together with various analytical functions. This is to meet the demands of a new market trend which increasingly requires image observation at ultra-high resolution and a wide variety of analytical work together in one SEM.
The SU-70 is a new-concept SEM, incorporating Hitachi's field-proven semi-in-lens technology and a new Schottky electron gun. It features not only ultra-high resolution (1.0 nm/15kV, 1.6nm*/l kV) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging (deceleration mode*) derived from Hitachi's highly reputed Super ExB filter technology. Its new Schottky electron gun, which can produce probe currents in excess of 200 nA†, enables a wide variety of analytical capabilities at high throughput. The newly designed specimen chamber also allows simultaneous mounting of various detectors such as EDX, WDX, EBSP, STEM, BSE, CL. This versatile port design also provides the option for a cryogenic sample stage.
|Secondary electron image resolution||1.0nm/15kV; 1.6nm/1kV|
|Magnification||20x - 800,000x|
|Probe Current||1 pA - 100 nA|
|5 axis motor-drive stage||X,Y: 0-110mm, Z: 1.5 - 40mm, T: -5/+70 deg., R: 360 deg.|
|Sample Size||150mm dia. (standard), 200mm dia. (option)|
|Mountable Accessories||EDX, WDX, EBSP, STEM, BSE, CL. cryogenic stage|