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Hitachi

Hitachi High-Technologies in Canada

Hitachi SU-70 UHR Schottky (Analytical) FE-SEM

Analytical FE-SEM combines the field-proven stability, high current, and brightness with ultra-high resolution required for a multitude of analytical applications. The Duo-objective Lens designed with a semi-in-lens optics provides capabilities for a wide range of applications that require high-resolution image observation and analysis. The SU-70 offers a industry-leading technology, quality, and reliability.

Overview

  • Ultra high resolution 1.0nm/15kV, 1.6nm/1kV
  • SE BSE signal control by Super ExB
  • Ultra-low accelerating voltage for shallow surface observation (*using deceleration mode)
  • Probe current 100 nA (attainable 200 nA)
  • EBSP analysis by Field-Free Mode
  • Sample chamber designed for a wide range of analytical accessories

This newest scanning electron microscope (SEM) from Hitach High Technologies can perform ultra-high resolution imaging together with various analytical functions. This is to meet the demands of a new market trend which increasingly requires image observation at ultra-high resolution and a wide variety of analytical work together in one SEM.

The SU-70 is a new-concept SEM, incorporating Hitachi's field-proven semi-in-lens technology and a new Schottky electron gun. It features not only ultra-high resolution (1.0 nm/15kV, 1.6nm*/l kV) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging (deceleration mode*) derived from Hitachi's highly reputed Super ExB filter technology. Its new Schottky electron gun, which can produce probe currents in excess of 200 nA, enables a wide variety of analytical capabilities at high throughput. The newly designed specimen chamber also allows simultaneous mounting of various detectors such as EDX, WDX, EBSP, STEM, BSE, CL. This versatile port design also provides the option for a cryogenic sample stage.

Specifications

Secondary electron image resolution 1.0nm/15kV; 1.6nm/1kV
Magnification 20x - 800,000x
Probe Current 1 pA - 100 nA
5 axis motor-drive stage X,Y: 0-110mm, Z: 1.5 - 40mm, T: -5/+70 deg., R: 360 deg.
Sample Size 150mm dia. (standard), 200mm dia. (option)
Mountable Accessories EDX, WDX, EBSP, STEM, BSE, CL. cryogenic stage