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Hitachi

Hitachi High-Technologies in Europe

E-6000 Series

Rapid increases in aerial densities of HDD (Hard Disk Drive) requires advanced patterning solutions for thin film head production.
This brings leading-edge semiconductor processes into the HDD industry as a breakthrough. Magnetic Head Etch System E-6000 Series: the EMCP (Electro Magnetically Coupled Plasma) etch system provides superior performance in profile control as well as in higher etching rate and selectivity compared to conventional ion-milling processes.

Main features

Applicable wafer diameter 150mm, 200mm
System configuration 2 etch+ 2 ash (max.)
These photographs are partially different from actual systems.