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Hitachi

Hitachi High-Technologies in Europe

Uniformized Electric Field Wafer Holder for S-9380/S-9380Ⅱ

It is well known that the process conditions are likely to fluctuate especially around the wafer edge area.
Uniformized electric field wafer holder can expand the measurable area at the wafer edge. It enables to control/monitor the CD on the wafer edge chip.
Uniformized electric field wafer holder can support quality control for Yield improvement.

Features

  • Uniformized electric field wafer holder can expand the measurable area at the wafer edge without any software upgrade.
  • This can contribute to improve the yield of wafer edge chip.

Applicable Model

  • S-9380/S-9380II