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Hitachi

Hitachi High-Technologies in Europe

Data Station for CD-SEM

The Data Station is a networked central recipe management server.

Features

For CD-SEMs, recipe creation and data management are also important requirements in addition to CD-measurements. However, it is not efficient for CD-SEMs to be used for recipe creation and data management. CD-SEMs should be used exclusively for CD-measurements. Data Station enables recipe creation and data management. Operation of the Data Station is as simple as using the CD-SEM.

Main function

  • Remote recipe management
  • Monitoring of machine operating status
  • Automatic data collection of measurement result
  • Recipe synchronization

Applicable model

  • S-9380Ⅱ(software version : V23 or higher, equipped with FA-PC) CG series (CG4000/5000)
  • CG series (CG4000/5000)
Note:
We recommend that the software version on Data Station and CD-SEMs should be unified to same version.
In case that the software version on Data Station and CD-SEM are not compatible, there are risks of destroying the recipe.