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Hitachi High-Technologies GLOBAL

Hitachi Scanning Electron Microscopes Application Data accumulated since its launched. Should you have any queries, please click (Inquiry Form).

Semiconductor

Semiconductor
Sheet No. Title / Abstract
SEM131 A SECTIONAL SEM SAMPLE PREPARATION USING AN ION BEAM MILLING TECHNIQUE

Model: E-3200

The E-3200 flat milling system is an SEM sample preparation instrument. It allows various angles of the incident ion beam to suit required milling conditions. It permits flat milling for preparation sectional samples as well as relief milling which allows topographic structures reflecting sample compositions or crystal orientations. Here, we report on quick observation grain boundaries of iron/steel samples. We also report on quality EDX and EBSD analyses of solder balls and Au-wire bonding sections.

SEM097 EVALUATION OF ELECTRONIC MATERIALS USING A VP-SEM

Model: VP-SEM SERIES

For improving the production yield of electronic components which are used on PCs, cellular phones, etc., it is important to identify the cause of defects as quickly as possible. Scanning electron microscopy is one of the convenient and useful techniques available for this purpose. The electronic industry requires, however, that these samples be observed and analyzed without preparation prior to microscopy. There are specially built microscopes called VP-SEMs which have been used for microscopy of non-conductive samples as well as water/oil containing samples primarily in such fields as biology and the food industry without preparation. We have used the VP-SEM for evaluation of various electronic materials without preparation. We report on some details here.

Materials science

Materials science
Sheet No. Title / Abstract
SEM132 A LOW VOLTAGE OBSERVATION FOR EVALUATION OF COMPOUND MATERIALS

Model: S-3400N, S-3700N

A new semiconductor BSE detector developed for the S-3400N/S-3700N SEMs allows high sensitivity and a short working distance (WD) owing to thin design and permits high performance at low operating voltages in VP-mode. We report here on features of a new BSE detector and some initial applications with compound materials including insulating samples.

SEM131 A SECTIONAL SEM SAMPLE PREPARATION USING AN ION BEAM MILLING TECHNIQUE

Model: E-3200

The E-3200 flat milling system is an SEM sample preparation instrument. It allows various angles of the incident ion beam to suit required milling conditions. It permits flat milling for preparation sectional samples as well as relief milling which allows topographic structures reflecting sample compositions or crystal orientations. Here, we report on quick observation grain boundaries of iron/steel samples. We also report on quality EDX and EBSD analyses of solder balls and Au-wire bonding sections.

SEM107 SCANNING ELECTRON MICROSCOPY OF FUNCTIONAL FILMS USING THE VARIABLE PRESSURE SEM

Model: S-3000N, S-3500N, S-4300SE/N

SEMs have been used for the evaluation of minute materials and have become an important tool for research and development in various fields of science and industry. Variable Pressure SEMs (VP-SEMs) in particular, allow observation of insulating materials and water or oil containing samples without sputter coating. They have been used in a variety of fields such as biology food science, and quality control of electronic components. Until recently, the Backscattered Electrons Detector (BSED) has been the primary detector used for sample observation using the VP-SEMs. Now, with the development of the Environmental Secondary Electron Detector (ESED), it has become possible to use secondary electrons for sample observation. ESED imaging with the VP-SEM allows visualization of surface morphology at higher magnifications than the BSE image. Utilizing the combination of the Hitachi VP-SEMs, and ESED we have imaged various functional film samples. The results are reported below in detail. The functional film samples that we imaged were taken from those commonly used in our daily lives. They range from films used for wrapping foods, daily consumables, and materials for electronic components as well as those used in agriculture. These films are tailored to specific functions such as luminescence, fireproofing and, anti-fogging, by blending fine particles in basic resins.SEM observation of resin samples usually requires that the sample be metal coated for electrical conductivity prior to observation. However, when a resin sample is coated problems such as sample deformation can occur due to the heat generated in the coating process. The advent of the VP-SEMs now allows direct microscopy of resin samples without the need of metal coating, thus no artifact is imparted.