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Tabletop MicroscopeHitachi High-Technologies GLOBAL


Ease of Use:
Compact and portable with incredibly simple operation

Tabletop installation

The space-saving and lightweight TM3030 can be conveniently installed on a tabletop*. No cooling water is needed, so installation is quick and easy and requires only a standard 100-240 V AC power supply.

requires a table capable of supporting 100 kg.

Comprehensive auto-functions, with one-click “Start”

Imaging with the TM3030 couldn’t be simpler. Pressing the “Start” button automatically turns on the beam, adjusts focus, brightness and contrast, as well as displays the image at an easy-to-view starting magnification of x100.

Image of start

Image of Excuted Auto start

Image of Displays the image at a low magnification to easily view the sample and reference the location of interest

No Sample Preparation Necessary :
Versatile with a wide magnification range and multiple operating conditions

Image non-conducting specimens with ease

When a non-conductive sample is observed with a high-vacuum SEM, electrons accumulate on the specimen surface causes charge-up, preventing imaging. In order to avoid the charge-up damage, the sample is usually coated with a thin layer of metal prior to observation. This process is not only time-consuming, but also interferes with optical imaging of surface details as well as EDX analysis. The TM3030 overcomes this problem with “charge-up reduction mode.” This mode uses low-vacuum functionality to dissipate the charge.

Low-vacuum microscopy

By utilizing a low vacuum level inside the specimen chamber, more gas molecules are present. These gas molecules "G" can collide with the electron beam to generate positive ions "+" and electrons "e". Each positive ion "+" can be neutralized by one of the excess electrons "-" on the specimen surface. In this way the excess electrons on the surface of the sample are removed and the charge-up effect is eliminated or reduced.

Image of low-vacuum microscopy

Unparalleled Image Quality:
Enhanced image resolution for surface details

5 kV mode

The 5 kV accelerating voltage allows observation of surface details. It offers not only traditional topographic imaging, but also compositional imaging information. The 5 kV observation condition is further enhanced throughout high magnifications by improving the electron optics.

Image of magnetic head

Enhanced sharpness & contrast capability

These functions will be utilized to enhance image quality at any observation condition modes and will be very effective for high-magnification specimens.

Image of Premium grade paper

Innovative premium SE/BSE signal detectors

The TM3030Plus is equipped with a premium secondary electron detector and a backscattered electron detector which have been incorporated in FE-SEM or VP-SEM. Note: The TM3030 has a backscattered electron detector only.
These detectors can be operated effectively under low-vacuum conditions and can conduct both SE and BSE image observation without metal coating.

Images of Matel hydride, Power spray

Premium BSE image

Both the TM3030 and TM3030Plus feature a BSE detector with 4 independent segments. By adding or subtracting signals from segments in different combinations, it is possible to emphasize compositional or topographic details in the image, as well as to produce shadowed images which highlight the sample from a particular direction.

Premium BSE image

Optional 3D-View software can generate three-dimensional views of the sample without sample tilting and/or alignment. It uses the 4 directional surface profiles from the signals acquired with each segment of the 4-segment backscattered electron detector.


Large specimen handling

The large specimen stage allows the mounting of a specimen up to 70mm in diameter and 50mm thick.
XY specimen motion 35mm.

Large specimen handling(1)

Large specimen handling(2)


TM3030Plus enables to enhance image quality
in the low vacuum observation world.

Newly Innovated Secondary Electron Detector

Image of Ink printed
Specimen: Ink printed (Uncoated)
SE, 5 kV, Charge-up reduction mode,
Magnification: ×1.0 K

TM3030Plus has a premium SE detector which has been incorporated in FE-SEM or VP SEM, and well-accepted by users as a high-sensitivity detector. It can be operated effectively under a low-vacuum environment and allows for quick SE image observation without specimen preparation.

Unique Compositional Image

The TM3030Plus allows for effective image analysis with dual signals in one image; displayed as one combined SE signal providing surface rich information and BSE signal for compositional information.

BSE Image

Image of Ceramics (BSE Image)

SE Image

Image of Ceramics (SE Image)

Mixing Image

Image of Ceramics (Mixing Image)

Specimen: Ceramics(Uncoated)
5 kV, Standard mode,
Magnification: ×1.0 K

High Throughput EDX* and Seamless Operation

The Energy Dispersive X-ray Spectrometer (EDX) for the Hitachi TM3030 series is equipped with the latest SDD (silicon drift detector), a large detection area (30 mm2), and multiple elemental analyses such as point/area analysis, line scan and mapping.
Uncoated sample observation brings seamless operation for the two signals through element mapping.

BSE Image

Image of Varistor(BSE Image)

SE Image

Image of Varistor(SE Image)

Mapping Image

Image of Varistor(Mapping Image)

Specimen: Varistor(Uncoated)
15 kV, Standard mode,
Magnification: ×3.0 K

A larger detection area allows less beam damage, lowering electron beam drift and charge-up reduction, and makes it possible to conduct observation for uncoated specimen.



Tabletop Microscope TM3030 / TM3030Plus Specifications

ItemsTM3030 TM3030Plus
Magnification ×15 to ×60,000 (Up to ×240,000 with digital zoom)
Observation condition 5kV / 15kV / EDX
Observation mode Standard mode
Charge-up reduction mode
BSE:Conductor / Standard / Charge-up Reduction
SE:Standard / Charge-up Reduction
Mix:Standard / Charge-up Reduction
Image mode COMPO / Shadow 1 / Shadow 2 / TOPO
Sample stage traverse X:±17.5mm、Y:±17.5mm
Maximum sample size 70 mm in diameter
Maximum sample height 50 mm
Electron gun Pre-centered cartridge filament
Signal detection system High-sensitivity semiconductor
4-segment BSE detector
BSE:High-Sensitivity semiconductor 4-segment BSE detector
SE: High-Sensitivity Low Vacuum SE detector
Signal select BSE BSE/SE/Mix
Auto image adjustment function Auto start, Auto focus, Auto brightness/contrast
Frame memory 640 × 480 pixels, 1,280 × 960 pixels
Image data memory HDD of PC and other removal media
Image format BMP, TIFF, JPEG
Data display Micron marker, micron value, date and time, image number and comments, Image mode, Observation condition, D* (Distance), Observation mode
Evacuation system (vacuum pump) Turbomolecular pump: 30 L /s × 1 unit,
Diaphragm pump: 1 m3/h × 1 unit
Operation help functions Raster rotation, Magnification preset (two steps)
Image shift (±50 µm@D*=4.5 mm)
Safety device Over-current protection function, built-in ELCB
D (Distance) is defined as the distance between lower surface of a high-sensitive semiconductor BSE detector and sample surface.

Required PC specifications

Items Description
OS Windows® 7 Professional (64bit version)
CPU Intel® CoreTM i5-2520M (Equivalent or higher)
Memory size 2 GB minimum
Display monitor 1,280 × 800 pixels or 1,368 × 768 pixels
Display size 15-inch display
Interface connector Installing USB 2.0 / 3.0 and PC-card slot
(IEEE1394 (6pin) for Oxford EDX is indispensable.)
Memory device With HDD DVD-ROM Drive
Other More than 100MB of free space in HDD is required
:An associated PC to be procured locally
:Windows is a registered trademark of Microsoft Corporation in the United States and/or other countries.
:Intel is a registered trademark of Intel Corp. or its affiliated companies in the United States and/or other countries.
:Specifications of a PC are subject to change.

Dimensions and Weight

ItemsTM3030 TM3030Plus
Main unit 330 (W) × 606 (D) × 565 (H) mm, 63.0 kg (manual stage)
330 (W) × 633 (D) × 565 (H) mm, 66.0 kg (motor drive stage)
330 (W) × 606 (D) × 565 (H) mm, 65.0 kg (manual stage)
330 (W) × 633 (D) × 565 (H) mm, 68.0 kg (motor drive stage)
Diaphragm pump 145 × 256 × 217 mm, 4.5 kg

Installation condition

Room temperature 15 to 30°C (Δt=±2.5°C/h or less)
Humidity 45%-70%RH
Power source (TM3030) Single-phase AC100 to 240 V
(Minimum: 90 V, Maximum: 250 V)
Grounding 100 ohm or less
:Another power source for PC is required.
:A table with casters is not suitable to put a main unit of TM3030 on.
:Recommended table size: 1,200×800 mm, withstand load: 100 kg or more.
:Periodical maintenance is required for this apparatus.
:Limited to indoor operation.
:TM3030 is not approved as a medical device.
:Powercables, earth terminal and table should be prepared by users.
:Please put a diaphragm pump under the table.
:Please make room for more than 200 mm to the left side of a main unit and put it the closest to the center position of the table.
:It is advisable not to install or relocate the instrument by yourselves.
:When relocating the system, please contact in advance the sales department that handles your account or a maintenance service company designated by Hitachi.
:Dedicated mentors, teachers who received the operation training of the instrument are required at compulsory schools.


Easy electron gun maintenance

When a filament is blown, changing the filament is rather easy. Remove the filament from the Wehnelt cap and simply attach a new filament assembly. Since the new filament is pre-centered at our factory, no adjustment is necessary. After attaching the filament assembly to the electron gun, it will be necessary to align the beam according to the on-board instructions for beam alignment.

Pre-centered cartridge filament
Pre-centered cartridge filament

Wehnelt electrode
Wehnelt electrode

Mechanical axis adjustment GUI
Mechanical axis adjustment GUI