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Hitachi

Hitachi High Technologies in America

Design Based Metrology System

RecipeDirector: CD-SEM recipe automatic creation utilizing design data

DesignGauge-Analyzer: Supporting OPC evaluation and optimizing pattern measurement in Lithography process

RecipeDirector

Features of RecipeDirector

  • Off-line recipe creation without using a wafer and CD-SEM
  • Automatic recipe creation by specifying measurement points and methods
  • High Quality Recipes(Consistent - not dependent on operator skill)
  • Server/Client style


CD-SEM recipe automatic creation utilizing design data

DesignGauge-Analyzer

Features of RecipeDirector

  • Post-measurement function for SEM images acquired in CG5000
  • Data analysis function such as SEM image view and measurement data confirmation
  • Contour(pattern contour) extracting function utilizing measurement algorithm(Contour:Option)


Supporting OPC evaluation and optimizing pattern measurement in Lithography process

 

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