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Hitachi

Hitachi High-Tech in Canada

RecipeDirector / DesignGauge-AnalyzerPlus

RecipeDirector:
Offline automated recipe creation without using a wafer by utilizing design data

DesignGauge-AnalyzerPlus:
Advanced data analysis station for CD-SEM images

RecipeDirector

  • Utilizing design data on RecipeDirector provides automatic setting of coordinates of addressing points, auto focus point, and measurement cursor boxes without specific know-how
  • This leads to short time recipe creation and improvement in CD-SEM availability

Recipe creating image

DesignGauge-AnalyzerPlus

  • DesignGauge-AnalyzerPlus is the advanced data analysis station which provides offline post measurement, contour extraction using SEM images and measurement result acquired from CD-SEM

Offline post-measurement and contour extraction