Toward the ultimate TEM sample preparation system
FIB-SEM systems have become an indispensable tool for characterization and analysis of the latest technologies and high performance nano-scale materials. An ever-increasing demand for ultrathin TEM lamellas without artifacts during FIB processing require the best in ion and electron optics technologies.
Hitachi's NX2000 high performance FIB and high resolution SEM system with its unique sample orientation control* and triple beam* technologies, supports high throughput, and high quality TEM sample preparation for cutting edge applications.
* Option
Real-time SEM monitoring during FIB milling
Sample: NAND flash memory
Accelerating voltage: 1 kV
FOV: 0.6 µm
With sample orientation control
Without sample orientation control
EB: Electron Beam
FIB: Focused Ion Beam
Ar: Argon ion beam
FIB column | |
---|---|
Resolution (SIM) | 4 nm @ 30kV, 60 nm @ 2kV |
Acceleration voltage | 0.5 kV - 30 kV |
Beam current | 0.05 pA - 100 nA |
FE-SEM column | |
Resolution | 2.8 nm @ 5kV, 3.5 nm @ 1kV |
Acceleration voltage | 0.5 kV - 30 kV |
Electron source | Cold cathode field emission source |
Detector | |
Standard detector | Upper/Lower SED & BSED |
Stage | X: 0 - 205 mm Y: 0 - 205 mm Z: 0 - 10 mm R: 0 - 360° infinite T: -5 - 60° |
Specimen: 3D NAND flash memory
(a) Schematic view
(b) Cross-sectional BSD image (Accelerating voltage : 2 kV)
(c) 3D reconstructed image (Volume rendering)
Specimen: 3D NAND flash memory
Observation: HF-3300 Cold FE-TEM (Accelerating voltage : 200 kV)
Specimen: 22 nm FinFET
Observation: HF-3300 Cold FE-TEM (Accelerating voltage : 200 kV)
Specimen: GaN/InGaN
Final milling: 1 kV Ar
Observation: HD-2700 Aberration -corrected STEM (Accelerating voltage : 200 kV)
30 kV FIB
1 kV Ar
Specimen: Zirconium
Observation: HF-3300 cold FE-TEM (Accelerating voltage: 300 kV)
30 kV FIB
1 kV Ar
Specimen: Aluminium
Observation: HF-3300 cold FE-TEM (Accelerating voltage: 300 kV)
This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.