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Performance & Power in a Flexible Platform
Hitachi High-Tech's scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance. The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.
■Robust Stage for Flexibility in Sample Size, Shape, and Weight
■Increased Viewing Area—SEM MAP Expands the Boundaries of Sample Navigation
■Multiple Modes of Operation
■ Automatic Functions for Operators of Any Skill Level
■Multi Zigzag enables wide-area observation across multiple areas.
■Report Creator generates reports of acquired data.
■High Sensitivity Detectors Supporting All Observation Requirements
■A Variety of Accessories Mountable onto Any of the 20 Ports in the Innovative SU3900 Specimen Chamber.
■SEM/EDS Integration System*
■3D Modeling Software: Hitachi map 3D*
■Image Processing, Measurement, and Analysis Software: Image-Pro for Hitachi
Features a graphical user interface offering easy operation and flexibility by:
Features of our proprietary Intelligent Filament Technology (IFT):
The Zigzag function enables automatic acquisition of a continuous field of view. The Multi Zigzag function enables zigzag settings at multiple locations on the sample stage, allowing the acquisition of multiple high-magnification images at user-selectable regions of interest. These images can be montaged to create pixel-dense-micrographs by connecting the acquired images with the Viewer function.
The SU3800/SU3900 feature a high-sensitivity UVD. UVD can acquire images and CL information with secondary electron information by detecting the light generated by collisions of secondary electrons and residual gas molecules accelerated by a bias electrode.
With a 5-segment design, it is possible to observe composition images, 3D images, and topographic images from 4 directions without sample rotation. Due to the design and high sensitivity of the detector, high-resolution imaging with improved S/N retention is possible.
The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.
The newly developed SEM/EDS integration system unifies stage location, condition setting, analysis, reports, and a series of operations from the SEM graphic user interface of the SU3800/SU3900. Controlling everything from the SEM graphic user interface improves throughput and reduces operator tasks.
Hitachi map 3D automatically combines 4 images acquired from different directions using the backscattered electron detector to construct a 3D model. Measurements such as height between two points, volume, and simple surface roughness (area roughness, line roughness, etc.) are possible. Since all backscattered electron data is collected in a single acquisition, it is not necessary to tilt the sample or adjust the field of view.
The SU3800/SU3900 feature IPI, which transfers SEM images to advanced image-processing software (Image-Pro® manufactured by Media Cybernetics Inc.). The operator can transfer data from SEM images to sophisticated image-analysis software with just one click.
The results of observing the same field of view of the zircon crystal are shown below. It is difficult to visualize the gradual concentration difference of zirconium in the BSE image. On the other hand, it can be confirmed that the dark area of the CL image corresponds to the area where the concentration of zirconium is high.
|Secondary Electron Resolution||3.0 nm (accelerating voltage 30 kV, WD＝5 mm, high vacuum mode)|
|15.0 nm (accelerating voltage 1 kV, WD＝5 mm, high vacuum mode)|
|Backscattered Electron Resolution||4.0 nm (accelerating voltage 30 kV, WD＝5 mm, low vacuum mode)|
|Magnification||×5 to ×300,000 (magnification of image*1)|
|×7 to ×800,000 (magnification of actual display*2)|
|Accelerating Voltage||0.3 kV to 30 kV|
|Low Vacuum Mode Setting||6 to 650 Pa|
|Image Shift||± 50 µm (WD＝10 mm)|
|Maximum Specimen Size||Φ 200 mm||Φ 300 mm|
|Specimen Stage||X||0 to 100 mm||0 to 150 mm|
|Y||0 to 50 mm||0 to 150 mm|
|Z||5 to 65 mm||5 to 85 mm|
|R||360° in continuous mode|
|T||－20 to +90°|
|Maximum Movable Range||Φ 130 mm (in combination with R)||Φ 200 mm (in combination with R)|
|Maximum Movable Height||80 mm (WD= 10 mm)||130 mm (WD= 10 mm)|
|Motor Drive||5-axis motor drive|
|Electron Optics||Electron-Gun||Pre-centered cartridge type tungsten hairpin filament|
|Objective-Lens Aperture||4-hole movable aperture|
|Detectors||Secondary electron detector, sensitive semiconductor backscattered electron detector|
|WD for EDX analysis||WD＝10 mm (T.O.A＝35°)|
|Image Display||Auto-Axis Alignment. Function||Beam control : auto (AFS→ABA→AFC→ABCC)|
|Optical axis adjustment: auto (current alignment)|
|Beam brightness: auto|
|Auto Image Adjustment Function||Auto brightness and contrast control (ABCC)|
|Auto focus control (AFC)|
|Auto stigma and focus (ASF)|
|Auto filament saturation (AFS)|
|Auto beam alignment (ABA)|
|Auto start (HV-ON→ABCC→AFC)|
|Operation Auxiliary Function||Raster rotation, dynamic focus, image improvement function, Data input (point-to-point measurement, angle measurement, texts),preset magnification, Stage positioning navigation function (SEM MAP), beam marking function|
|Optional function||■Hardware: Track ball, Joystick, Operation panel, Compressor, Ultra sensitive low vacuum detector (UVD), Chamber scope, Camera navigation system ■Software: SEM data manager, External communication interface, 3D-capture, Stage free mode, EDS integration|
|Options(for External Devices)||Energy dispersive X-ray spectrometry (EDS), Length dispersive X-ray spectrometry (WDS),Various external stages (heating stage, cooling stage, tensile stage)|
1. Set magnification with 127 mm x 95 mm (4" x 5" picture size) as display size.
2. Set magnification with 509.8 mm x 286.7 mm (1,920 x 1,080 pixels) as display size.
This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.