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Hitachi

Hitachi High-Tech in Europe

Design Based Metrology System

DG

Introducing the product lineup of design based metrology system

RecipeDirector:
CD-SEM recipe automatic creation utilizing design data

DesignGauge-Analyzer(DG-A):
Supporting OPC evaluation and optimizing pattern measurement in Lithography process

RecipeDirector

Features

  • Off-line recipe creation without using a wafer and CD-SEM
  • Automatic recipe creation by specifying measurement points and methods
  • High Quality Recipes(Consistent - not dependent on operator skill)
  • Server/Client style


CD-SEM recipe automatic creation utilizing design data

(DG-A)

Features

  • Post-measurement function for SEM images acquired in CG5000 (HITACHI CD-SEM)
  • Data analysis function such as SEM image view and measurement data confirmation
  • Contour(pattern contour) extracting function utilizing measurement algorithm（Contour:Option）


Supporting OPC evaluation and optimizing pattern measurement in Lithography process