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Hitachi High-Tech in Europe

High-Speed Defect Review SEM CR6300

Defect review SEM using the high-speed
ADR (Automatic Defect Review) and high accuracy
ADC (Automatic Defect Classification)can be used inline to improve the yield.
It is equipped with the bare wafer automatic review function, process monitoring function and systematic defect classification function.



  • New electron optic system provides enhanced resolution and contrast, and robustness for charging effect for capturing small and shallow defects.

High Speed ADR

  • Detection algorithms recognize the pattern repetitiveness on wafers and automatically select the proper ADR (Automatic Defect Review) Comparison Mode in order to achieve the highest possible throughput.


  • Automatic Defect Classification (ADC)
  • Automatic Defect Review of Unpatterned Wafers
  • Inspection & Process Qualifier (iPQ)