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Semiconductor scaling is continuing at a remarkable rate. The most advanced techniques are being introduced and device structures must now be controlled at the atomic level. To this end, electron microscopy has proved to be indispensable, because it allows high-resolution imaging with a quick turnaround time, and can be applied on different scales ranging from the package level to the atomic level required for the evaluation of controlled gate structures. Hitachi High-Tech provides the most advanced in-line analysis tools for semiconductor development and manufacture, and for device failure analysis and quality assurance. We produce a wide range of electron microscopy solutions, including the world's highest-resolution FE-SEM system, FIB-SEM systems, and TEM systems.