ID,グループID,部品名,部品番号,備考,写真No.,項,OPEN,INFO,AREA種別,AERA座標,親ID,Package,Delivery(Days),Stock,Old Parts,Mantenance Manual,Notice
11,11,,,,,,1,0,rect,"336,313,862,776",B
12,12,SIDE COVER ASSY(CM5610),811-1122,Repair Parts Left side cover for MSD,811-1122.png,17,0,0,,,11,1pcs/set,60,-,-,8.7,-

21,21,,,,,,1,0,rect,"336,313,862,776",11
22,22,TMP TV301SF (CM5610),811-3514,Inspection period (Evey 2years) Turbo molecular pump,DSCF2545.png,17,0,0,,,21,1pcs/set,120,Y,-,10.1,-
23,22,VAC ELECTROMAGNETIC VALVE ASSY,811-1057,Repair Parts Leak valve for turbo molecular pump,DSCF2547.png,17,0,0,,,21,1pcs/set,90,Y,-,10.2,-
24,22,TMP FAN ASSY (CM5610),811-1128,Repair Parts Cooling fan for turbo molecular pump,DSCF2551.png,17,0,0,,,21,1pcs/set,90,Y,-,10.3,-
25,22,TMP CONTROLLER (CM5610),893-5750,Repair Parts Controller for turbo molecular pump,DSCF2554.png,17,0,0,,,21,1pcs/set,105,Y,-,10.4,-
26,22,PIRANI GAGE WP-02 15D,K433004,Repair Parts Vacuum degree measuring instrument for MSD,DSCF2559.png,17,0,0,,,21,1pcs/set,10,Y,-,10.5,-
27,22,SQRF BOX ASSY (CM5610),811-4016,Repair Parts Q-Pole RF voltage control board,DSCF2426.png,17,0,0,,,21,1pcs/set,120,Y,-,10.9,-
28,22,MAIN UNIT FAN ASSY (CM5610),811-1129,Repair Parts Rear fan for MSD,DSCF2564.png,17,0,0,,,21,1pcs/set,90,Y,-,10.7,-
29,22,CHANNELTRON (CM5610),811-3512,Repair Parts MS detection unit,DSCF2561.png,17,0,0,,,21,1pcs/set,110,Y,-,10.6,-
30,22,AP2-ASSY (CM5610),811-1056,Inspection period (Evey 3months) Aperture 2 for MSD,DSCF2533.png,17,0,0,,,21,1pcs/set,110,Y,-,9.16,-
31,22,AP1-HEAT WIRE ASSY (CM5610),811-7763,Repair Parts AP1 heater,DSCF2483.png,17,0,0,,,21,1pcs/set,90,Y,-,9.19,-
32,22,AP1-TEMP WIRE ASSY (CM5610),811-7772,Repair Parts Thermocouple for AP1,DSCF2473.png,17,0,0,,,21,1pcs/set,90,Y,-,14.1.1,-
33,22,CIRCUIT BOARD ASSY SD (CM5610),811-5535,Repair Parts MSD RF voltage distribution and DC offset control board,DSCF2428.png,17,0,0,,,21,1pcs/set,120,Y,-,10.10,-