ID,グループID,部品名,部品番号,備考,写真No.,項,OPEN,INFO,AREA種別,AERA座標,親ID,Package,Delivery(Days),Stock,Old Parts,Maintenance Manual,Notice,Remarks
11,1,,,,,,1,0,rect,"307,313,634,690",D
12,2,Mass Flow Unit (1 Gas Line) NEXTA STA,CSF-5000,,6405.png,17,0,1,poly,"214,323,225,627,719,769,721,784,971,665,971,636,982,630,989,228,978,231,977,199,713,268,713,310,447,264",11,1 unit,-,In-stock Item,-,7.3.22,-,
13,2,Mass Flow Unit (3 Gas Lines) NEXTA STA,CSF-5200,,noimage.png,17,0,0,,,11,1 unit,-,In-stock Item,-,7.3.22,-,

21,3,,,,,,1,0,rect,"636,313,994,690",D
22,4,PWR Supply Box Fan (FAN2-J14P) NEXTA STA,CSF-3404,,6417.png,17,0,1,poly,"686,271,688,461,840,424,847,244",21,1 pc.,-,In-stock Item,-,7.3.9,-,
23,5,Power Supply Box NEXTA STA,CSF-3400,,6408.png,17,0,1,poly,"343,210,354,443,342,454,607,654,607,681,1007,569,1014,368,845,368,845,429,683,466,681,267,851,239,845,368,1014,368,1024,134,745,185,670,151",21,1 unit,-,In-stock Item,-,7.3.8,-,