ID,グループID,部品名,部品番号,備考,写真No.,項,OPEN,INFO,AREA種別,AERA座標,親ID,Package,Delivery(Days),Stock,Old Parts,Maintenance Manual,Notice,Remarks
11,1,,,,,,1,0,rect,"728,292,1094,568",B
12,2,Oリング P26 FKM-70,FDD-6122,,6438.png,17,0,1,rect,"970,342,1088,481",11,1個,14,Y,-,7.3.13,-,ファーナスチューブフランジに対面するOリングです。
13,2,ベローズOリングS,CSF-3605,,6437_6432_6435.png,17,0,0,,,11,1式,14,Y,-,7.3.14,-,
14,2,シャヘイブクミ,CSF-3603,,6445.png,17,0,0,,,11,1式,14,Y,-,7.3.16,-,
15,2,ドウニュウパイプ,CSF-3628,,6439.png,17,0,0,,,11,1個,14,Y,-,7.3.15,-,
16,3,テンビンビームセット(プ,GAA-0628,,6449.png,17,0,1,rect,"761,367,969,434",11,2個/式,14,Y,-,7.3.12,-,NEXTA STA、STA7000シリーズ共通部品
17,4,FAN5-J12Pセンブクミ,CSF-3306,,6463.png,17,0,1,poly,"910,270,910,365,966,365,966,338,1023,338,1023,270",11,1個,14,Y,-,7.3.25,-,
18,5,FAN3-J10Pセンブクミ,CSF-3806,,6462.png,17,0,1,rect,"124,286,231,480",11,1個,14,Y,-,7.3.39,-,

21,6,,,,,,1,0,rect,"279,235,758,594",11
22,7,300カネツロS,CSF-4044,,6430.png,17,0,1,poly,"354,155,620,271,616,491,649,516,673,490,671,463,691,445,663,407,661,313,697,253,733,225,749,226,755,238,778,237,786,239,791,158,499,39",21,1個,14,Y,-,7.3.23,-,
23,7,200カネツロS,CSF-4043,,6430.png,52,0,0,,,21,1個,14,Y,-,7.3.23,-,
24,7,200RVカネツロS,CSF-4045,,DSC_0068.png,52,0,0,,,21,1個,14,Y,-,7.3.23,-,

31,8,FANクウレイクミ,CSF-3900,,6422.png,17,0,1,poly,"439,81,342,160,614,275,610,542,548,609,547,529,537,523,510,547,491,555,470,559,433,551,390,528,351,490,343,493,328,487,327,474,335,466,324,445,315,412,231,375,221,233,269,157,374,70,402,67",21,1個,14,Y,-,7.3.18,-,
32,8,FANクウレイRVクミ,CSF-3901,,6421.png,52,0,0,,,21,1個,14,Y,-,7.3.18,-,

41,9,アルミナファーナスチューブS,CSF-4002,,6424.png,17,0,1,poly,"787,245,779,243,755,246,744,231,730,231,696,263,668,314,669,402,698,441,726,430,754,443,772,437,783,429,793,437,805,434,816,427,844,382,852,355,851,327,849,323,833,315,830,294,822,284,805,276,802,276,797,276",21,1個,14,Y,-,7.3.24,-,
42,9,（5124-1052-001--3）ファーナスチューブブ（RVヨウ） クミタテズ,AGS-0042,,6425.png,52,0,0,,,21,1個,14,Y,-,7.3.24,-,



101,101,,,,,,1,0,rect,"728,573,1094,710",B
102,102,FAN4-J11Pセンブクミ,CSF-3807,,6461.png,17,0,1,rect,"657,340,844,457",101,1個,14,Y,-,7.3.40,-,

111,103,,,,,,1,0,poly,"332,231,332,638,652,638,652,335,849,335,849,462,652,462,652,638,1224,638,1224,231",101
112,104,カネツロハイセン2S,CSF-3809,,6428.png,17,0,1,rect,"422,323,667,378",111,1式,14,Y,-,7.3.35,-,ケーブルベアは含まれません。
113,105,カネツロハイセン1S,CSF-3808,,6427.png,17,0,1,rect,"679,323,881,378",111,1式,14,Y,-,7.3.34,-,ケーブルベアは含まれません。
114,106,センサーユニットクミ,CSF-3803,,6456.png,17,0,1,rect,"456,577,944,692",111,1式,14,Y,-,7.3.38,-,
115,107,カネツロクドウブクミ,CSF-3800,,6413.png,17,0,1,rect,"379,381,910,572",111,1個,14,Y,-,7.3.33,-,



201,201,,,,,,1,0,rect,"142,292,723,710",B
202,202,CPU PBクミ,CRD-0037,,6481.png,17,0,1,rect,"148,216,864,662",201,1個,14,Y,-,7.3.1,-,NEXTA STA 専用です。