Imaging Equipment
Research and development
Focused Ion and Electron Beam System
Ethos NX5000
Ethos NX5000
For processing bulk samples into a thin film
Achieve both low-acceleration-voltage, high-resolution observation and real-time FIB-processed observation
Achieve both low-acceleration-voltage, high-resolution observation and real-time FIB-processed observation
This high-performance FIB-SEM system features a world-class high-brightness cold cathode field emission electron gun and a newly developed electromagnetic field superimposed compound objective lens. The FIB column, which is used to process samples, and the SEM column, which is used to observe samples under high magnification, are located in the same sample chamber. This enables high-magnification analysis of sample surfaces and the microstructure and composition of specific areas inside samples.