This system’s SEM column and FIB column are orthogonally arranged to optimize it for 3D structural analysis. With this system, the sample is repeatedly processed and observed with a high degree of precision to gain an understanding of its 3D microstructure. This makes it possible to three-dimensionally analyze the distributions of particles in electrodes, etc.
For information on FIB microsampling and our air protection holder for thin film, click the supplementary materials button below.