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Hitachi

Hitachi High-Tech GLOBAL

Electron Source

Applied Physics Technologies manufactures electron sources used primarily for analysis and inspection equipment and metal 3D printers.

Main products

CeBix®

Materials Cerium Hexaboride(CeB6)
Cerium Hexaboride(CeB6)
Features Long lifetime, High brightness, Contaminate Resistant(Comparison with LaB6)
Application Scanning Electron Microscope (SEM),Transmission Electron Microscope (TEM),Electron Beam Microanalyzer (EPMA)Surface Analyzer,Metal 3D printer,Micro Focus X-Ray source,Lithography equipment, etc.

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LaB6

Materials Lanthanum Hexaboride (LaB6)
Features Long lifetime, High brightness (Comparison with Tungsten Filament).
Application Scanning Electron Microscope (SEM),Transmission Electron Microscope (TEM),Electron Beam Microanalyzer (EPMA)Surface Analyzer,Metal 3D printer,Micro Focus X-Ray source,Lithography equipment, etc.

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REFRACTORY METAL SINGLE CRYSTALS

Materials W, Ta, Mo, Re, Ir, Hc, Pt, Ni, etc.
Features Manufacturing High Purity and High Quality Single Crystals by Zone Refining Process with In-house Equipment.
Application SEM, TEM, Semiconductor Analysis Equipment, X-Ray Tube, EPMA, Lithography Equipment, etc.

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TRANSITION METAL CARBIDE CATHODES

Materials HfC, ZrC, TiC, NbC, etc.
Features High Melting Point, High Durability, Lower Evaporation (Long Lifetime)
High Performance under Poor Vacuum Environment
Application Better Performance With Replacing Current Thermal Emission Source, Materials for R&D, Various Electron Source Application, etc.

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Type of electron source

Type of electron source
Comparison Item Thermionic Source (W) Thermionic Source (LaB6/CeBix®) Schottky (SE) Electron Source Field Emission(FE)Electron Source
Electron Beam Emission Method Heat W Hairpin Filament Heat a Small Single Crystal Heating and Applying High Voltage to Needle Metal (Use Schottky Effect) Application of High Voltage to Needle Metal (Use Tunnel Effect)
Brightness ◎+
Monochromaticity
Resolution ◎+
Amperage
Stability
Lifetime
Cost
Handle ability