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Hitachi High-Tech GLOBAL

(Left) Optic Image
(Right) Element mapping image of Fe

Conventional contaminant analysis by fluorescent X-rays uses a micro-sized beam to irradiate comparatively large contaminants, which can be verified visually or by a microscope, and performs element analysis. The EA6000VX performs rapid mapping of an entire sample surface enabling detection of non-visible trace contaminants by a high sensitivity and high speed mapping function.

Captures contaminants not visible in optic images.