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Hitachi High-Technologies GLOBAL

Applies an AC or DC voltage between a conductive cantilever and sample and creates an image of the electrostatic force components (amplitude component and phase component)by an AC voltage.
・EFM (AC)…AC field response
・EFM (DC)…DC field response
KFM directly detects potential of sample surfaces.
EFM does not directly detect surface potential but has better responsiveness than KFM and is convenient for imaging qualitative electrical properties.

Schematic diagram of EFM(AC)

EFM(AC) measurements before/after AC erase of polarization patterns in ferroelectric thin film

  • Electron Microscopes (SEM/TEM/STEM)
  • Atomic Force Microscopes (AFM)
    • Description
      • Dynamic Force Microscope (DFM)
      • Scanning Tunneling Microscope (STM)
      • Sampling Intelligent Scan (SIS)
      • Phase Mode (PM)
      • Friction Force Microscope (FFM)
      • Lateral Modulation FFM (LM‐FFM)
      • ViscoElastic AFM (VE‐AFM) / Force Modulation Microscope
      • Adhesion
      • Current / Pico‐current
      • Scanning Spread Resistance Microscope(SSRM)
      • Kelvin probe Force Microscope (KFM)
      • Electrostatic Force Microscope (EFM)
      • Piezo‐Response Microscope (PRM)
      • Magnetic Force Microscope (MFM)
      • Scanning Non‐linear Dielectric Microscope(SNDM)
      • Atomic Force Microscope (AFM) / Contac Mode
    • Special Contents
    • Image Gallery

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