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Hitachi High-Technologies GLOBAL

Measures the surface potential by the feedback DC voltage by applying AC as well as DC voltages between a conductive cantilever and sample so that the amplitude of the static force component from the AC voltage is zero.

  • CC-KFM (Cyclic contact KFM)
  • NC-KFM (Non-contact KFM


Diagram of electronic energy levels between the probe and metal sample during KFM measurements


Schematic diagram of KFM

DC voltage (VOFF), which is adjusted for the vacuum level (EVAC) to be equal to the probe and sample, becomes equivalent to the contact potential difference (the difference between probe work function ΦP and sample work function Φ S) between the probe and sample.

  • Electron Microscopes (SEM/TEM/STEM)
  • Atomic Force Microscopes (AFM)
    • Description
      • Dynamic Force Microscope (DFM)
      • Scanning Tunneling Microscope (STM)
      • Sampling Intelligent Scan (SIS)
      • Phase Mode (PM)
      • Friction Force Microscope (FFM)
      • Lateral Modulation FFM (LM‐FFM)
      • ViscoElastic AFM (VE‐AFM) / Force Modulation Microscope
      • Adhesion
      • Current / Pico‐current
      • Scanning Spread Resistance Microscope(SSRM)
      • Kelvin probe Force Microscope (KFM)
      • Electrostatic Force Microscope (EFM)
      • Piezo‐Response Microscope (PRM)
      • Magnetic Force Microscope (MFM)
      • Scanning Non‐linear Dielectric Microscope(SNDM)
      • Atomic Force Microscope (AFM) / Contac Mode
    • Special Contents
    • Image Gallery

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