Technical information
Automated AFM measurements following a recipe
A range of AFM operations that can be performed with just the touch of a button
Method 1 for Utilizing Recipes: Continuous measurement via electric stages
Applicable products:
By setting multiple samples on an electric stage, it is possible to measure each, one by one.
Method 2 for Utilizing Recipes: Continuous narrow-range operation over multiple locations of a broad image range
Applicable products:
After AFM measurement of the broad range, open the recipe and click on any domain of the broad image range with a mouse to perform continuous narrow-range measurement of multiple locations.
Method 3 for Utilizing Recipes: More efficient measurement, even with small units
Applicable products:
Even if measurement is conducted by exchanging fragmented samples such as small units, operation can be performed with the single push of a button by creating a recipe for each sample.
Actual measurement cases
Can be used to measure nano-particles and perform quality control that addresses issues such as substrate film roughness.
Other features
Can be used to measure nano-particles and perform quality control that addresses issues such as substrate film roughness.
- Possible to set Q curve measurement conditions within recipes
- In addition to routine measurement according to parameters set for each sample, the automatic adjustment function RealTuneII can also be incorporated into recipe parameters
- Output of all hardness analysis results measured with recipe is possible as a CSV file
- For more advanced analysis, we also propose using an automatic analysis method that employs offline software.
Product lineup
Hitachi AFM will prove useful at any stage
By application
Automation / Ease of use
High accuracy / High resolution
- High-accuracy measurements of slanted surfaces with a steep slope
- High-accuracy measurements without damaging samples
- High-resolution measurements in a vacuum
- Stable and accurate measurements during sample heating and cooling
- High-accuracy topography measurements
- High-sensitivity MFM measurements in ambient or vacuum environments
- Humidity control / observations in liquid
Physical property measurements /
Environmental Controls
- Measurements of work functions in ambient or vacuum environments
- Observations of dopant distribution
- Quantitative measurements of elastic modulus
- Observations of structural changes in a vacuum
- Enabled true observations of topography and other physical properties
- Enabled quantitative measurements during sample heating and cooling
This section introduces applications (actual measurement cases) for scanning probe microscopes (SPM/AFM).
Information for product users
This section offers information aimed at customers who use our scanning probe microscopes.
For first-time users
Related topics
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