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Electron Beam Absorbed Current (EBAC) Characterization System nanoEBAC NE4000

Electron Beam Absorbed Current (EBAC) Characterization System nanoEBAC NE4000

The Hitachi NE4000 nanoEBAC is an electron beam based probing system for electrical characterization and EBAC analysis and imaging of microelectronic device interconnects, materials, and components.

    Overview

    Electron Beam Absorbed Current (EBAC) technique offers a quick and effective method to identify open circuits, high resistance and shorts along interconnects without direct probing techniques of lower level layers.
    The EBAC technique is performed with the electron beam by passing through the dielectric layers down to the lower level metallization layer in order to absorb the electron beam current. The electron beam accelerating voltage of the FESEM controls the probing depth or penetration level through the dielectric layers. A single probe is placed on the exposed, upper layer metallization to complete the circuit and allow the electrons to flow through the interconnect.
    Observation of high resistance and shorts due to Seebeck effect is possible by using dual probes along with the Hitachi patented differential EBAC amplifiers.

    User-Friendly Design

    • Intuitive GUI(Graphical User Interface) with various image and color processing functions.
    • Coarse positioning of probes are accomplished by an integrated in-chamber CCD camera system.

    Premium Image Quality

    • Provides high quality EBAC images with Hitachi's patented high performance EBAC amplifiers.

    Outstanding Performance

    • Field Proven, low chromatic aberration, Cold Field Emission (CFE) electron gun for low accelerating voltage imaging and beam damage reduction of the circuit.
    • High precision nano-probe units.

    Advanced Applications

    • Dedicated nano-probing system with EBAC analysis and electrical characteristics analysis. Large specimen stage can provide fine material and electronics components evaluation.

    Specifications

    Hitachi Electron Beam Absorbed Current(EBAC) Characterization System nanoEBAC NE4000

    Probe unit
    Unit number 4
    Driving method Piezoelectric
    Fine stroke range 5 µm (X,Y)
    Coarse stroke range 6 mm (X,Y)
    Specimen stage / Base stage
    Specimen size 25 mm × 25 mm × 1 mm thick or less
    Traverse position Measurement / Specimen exchange position
    Specimen exchange Air-locked exchange chamber
    Prober navigation Stage traverse to probe position
    Measurement position memory
    Probe coarse adjustment
    CCD image display Image display from lateral direction
    Electron optics
    Electron gun Cold field emission electron source
    Accelerating voltage 0.5 kV to 30 kV
    Resolution 15 nm (at 2 kV, WD=15 mm)
    Image shift ±150 µm (at 2 kV, WD=15 mm)
    EBAC amplifier / Image display
    Amplifier type Current amplifier / Differential amplifier
    Image display SEM / EBAC (Single / Parallel / Overlay)
    Image processing Black and white reversal display, color display, brightness adjustment, slow scan integration, belt scan

    Dimensions and Weight

    Main unit 1,100 (W) × 1,550 (D) × 1,750 (H) mm,
    850 kg
    Display unit 1,000 (W) × 1,005 (D) × 1,200 (H) mm,
    265 kg

    Utility requirement

    Room temperature 15 - 25 °C
    Humidity 60% RH or less
    Power AC100 V±10% 5 kVA (M5 crimp terminal)
    Grounding 100Ω or less

    Features

    User-Friendly Design

    Flexible GUI system for optimization and fine control
    Flexible GUI system for optimization and fine control

    Z axis CCD image for probe and specimen height optimization
    Z axis CCD image for probe and specimen height optimization

    Premium Image Quality

    EBAC image of LSI’s net using Hitachi’s original EBAC amplifier
    (courtesy of Renesas electronics corporation)

    Outstanding Performance

    High quality and high resolution imaging with refined nano-probe precision

     

    Application Data

    Technical magazine
    "SI NEWS"

    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.

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