Field Emission Transmission Electron Microscope HF-3300

Features

High-brightness Cold Field Emission (Cold FE) electron source

Cold field emission electron source benefits nanoscale analysis with its high brightness and high-energy resolution. Its inherent high coherency greatly contributes to ultra-high resolution imaging and electron holography.^*

300 kV accelerating voltage

A 300 kV accelerating voltage allows atomic-resolution imaging for thick specimens. Metals and ceramics with high atomic numbers are less electron transparent and often need to be observed at a 300 kV accelerating voltage.

Unique analytical capabilities

The newly introduced spatially resolved EELS^* and the in-situ SEM/TEM imaging^* nanobeam electron diffraction provide sophisticated and unique analytical capabilities.

Holder linkage with the FIB system^*

The Hitachi-FIB-compatible specimen holder^* requires no tweezer handling of TEM grids between FIB fabrication and TEM observation and ensures high-throughput TEM analysis. Hitachi's unique specimen rotation holder^* enables real-time multidirectional structural analysis together with an STEM unit.^*

User-friendly operation

Windows-based TEM/STEM^* computer control, a motor-driven movable aperture, and a 5-axis motorized stage make the high-end TEM more accessible. It only takes 10 minutes to be high-voltage-ready and 1 minute for specimen exchange, providing high sample throughput for TEM analysis.

*:

Optional accessory

Specifications

Items		Description
Electron source		W(310) cold field emission electron source
Accelerating voltage		300 kV, 200 kV*2, 100 kV*2
Resolution	Lattice	0.10 nm
	Point-to-point	0.19 nm
	Information limit	0.13 nm
Magnification	Low Mag mode	200 - 500×
	High Mag mode	2,000 - 1,500,000×
Image rotation		±5° or less (High Mag mode, below 1,000,000×)
Specimen tilt		±15°
Camera length		300 - 3,000 mm

*1

Specification at 300kV

*2

Optional accessory

Application Data

Materials Science

Semiconductors