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Field Emission Transmission Electron Microscope HF-3300

Field Emission Transmission Electron Microscope HF-3300

The HF-3300 is a 100-300 kV TEM/STEM/SEM powered by Hitachi's state-of-the-art cold field emission technology for high-brightness and high-energy resolution. Capabilities needed for daily material structural characterizations and analysis are provided. Unique electron optical designs include spatially resolved EELS* and double biprism* electron holography (special order). The simultaneous secondary electron imaging and STEM imaging reveal surface and bulk structures at the same time. A special version for gas environmental TEM or aberration-corrected microscopy is available.

    Features

    High-brightness Cold Field Emission (Cold FE) electron source

    Cold field emission electron source benefits nanoscale analysis with its high brightness and high-energy resolution. Its inherent high coherency greatly contributes to ultra-high resolution imaging and electron holography.*

    300 kV accelerating voltage

    A 300 kV accelerating voltage allows atomic-resolution imaging for thick specimens. Metals and ceramics with high atomic numbers are less electron transparent and often need to be observed at a 300 kV accelerating voltage.

    Unique analytical capabilities

    The newly introduced spatially resolved EELS* and the in-situ SEM/TEM imaging* nanobeam electron diffraction provide sophisticated and unique analytical capabilities.

    Holder linkage with the FIB system*

    The Hitachi-FIB-compatible specimen holder* requires no tweezer handling of TEM grids between FIB fabrication and TEM observation and ensures high-throughput TEM analysis. Hitachi's unique specimen rotation holder* enables real-time multidirectional structural analysis together with an STEM unit.*

    User-friendly operation

    Windows-based TEM/STEM* computer control, a motor-driven movable aperture, and a 5-axis motorized stage make the high-end TEM more accessible. It only takes 10 minutes to be high-voltage-ready and 1 minute for specimen exchange, providing high sample throughput for TEM analysis.

    *:
    Optional accessory

    Specifications

    ItemsDescription
    Electron source W(310) cold field emission electron source
    Accelerating voltage 300 kV, 200 kV*2, 100 kV*2
    ResolutionLattice 0.10 nm
    Point-to-point 0.19 nm
    Information limit 0.13 nm
    MagnificationLow Mag mode 200 - 500×
    High Mag mode 2,000 - 1,500,000×
    Image rotation ±5° or less (High Mag mode, below 1,000,000×)
    Specimen tilt ±15°
    Camera length 300 - 3,000 mm
    *1
    Specification at 300kV
    *2
    Optional accessory

    Application Data

    Materials Science

    Au single crystal [110] high resolution TEM image

    Au single crystal [110] high resolution TEM image
    Accelerating voltage : 300 kV

    MWCNT high resolution TEM image

    MWCNT high resolution TEM image
    Accelerating voltage : 100 kV

    Graphene high resolution TEM image

    Graphene high resolution TEM image
    Accelerating voltage : 60 kV

    Pt/C catalyst in situ gas-injecting SEM & STEM observation

    Pt/C catalyst in situ gas-injecting SEM & STEM observation
    Temperature : 200°C
    Gas: H2, O2

    Gas atmosphere EELS spectrum acquisition

    Gas atmosphere EELS spectrum acquisition
    Accelerating voltage : 300 kV
    Gas : H2, O2, Air

    Crocidolite (asbestos) fiber HR Lorentz TEM image

    Crocidolite (asbestos) fiber HR Lorentz TEM image
    Accelerating voltage : 300 kV
    Instrument : HF-3300S WG-P.P. with B-COR TEM corr.
    Data courtesy of CEMES-CNRS, France

    Fe nanocube HR Lorentz phase reconstructed image

    Fe nanocube HR Lorentz phase reconstructed image
    Accelerating voltage : 300 kV
    Instrument : HF-3300S WG-P.P. with B-COR TEM corr.
    Data courtesy of CEMES-CNRS, France

    Semiconductors

    Cross sectional TEM image of 22 nm node FinFET

    Gas atmosphere EELS spectrum acquisition
    Accelerating voltage : 300 kV
    Prepared by NX2000 1 kV Ar ion milling

    HHT employee with HF-3300 expertise contributed to a paper published on "Nature communications."

    Hitachi High-Tech's Takeshi Sato collaborated with the Graduate School of Science at Tohoku University and Researcher Kazuo Yamamoto of the Japan Fine Ceramics Center (JFCC) on a paper published on the October 22, 2013 issue of "Nature Communications."

    Hitachi 300 kV HF-3300 In situ SEM/STEM Observation Work Won a Poster Award in RSC Tokyo Int'l Conference 2013

    At the RSC Tokyo International Conference 2013 (Sep. 5-6, 2013), a poster on Hitachi HF-3300 in-situ SEM/STEM imaging won a poster award, during the Flash Presentation & Poster Session.

     

    Applications

    Hitachi TEM Application Data

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    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.

    nanoart

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