Hitachi

Dr. Benning, IBM & Prof. Quate, Stanford Univ.

AFM文献
G. Benning, C.F. Quate, and Ch. Gerber, "Atomic Scope Microscope", Phys. Rev. Lett, v.56, p.930-933 (1986)
D. Ruger & P. Hansma, "Atomic Scope Microscopy", Physics Today, p.23-30 (1990)

最初のマイクロカンチレバー
T.R. Albrecht and C.F. Quate, "Atomic Resolution Imaging of a Nonconductor by Atomic Force Microscopy", J. Appl. Phys., v. 62, p.2599-2602(1987)