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Hitachi

Hitachi High-Tech in Korea

Green Laser Annealing

  • High quality polysilicon is formed by individual laser
  • Using original Line-beam to perform anneling on OLED, LCD-TFT substrate, semiconductor wafer process and etc.

Description

Features

  • DPSS laser application
  • High quality annealing system
  • Full or partial metal anneling
  • LTPS Processing

Applications

OLED, LCD-TFT substrates, Semiconductor wafer etc.

Processing Example

Optical system view from outside