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Hitachi

Hitachi High-Tech in Korea

X-Ray Inspection Equipment

  • Captures images with high luminance and high resolution with low power
  • Independent X-ray source from any conventional X-ray light source
  • Possible to observe fine foreign matter, voids and resin in resin which could not be seen so far clearly

Description

For R&D

  • 5 steps switching function of resolution(0.4um / 0.6um / 1um / 2um / 3um)
  • Detector maximum inclination : 60°
  • Stage diameter 400mm with 4 stage operation switching type
  • Monitor magnification : 7400 times
  • Geometric magnification : 1200 times
  • 2 point distance measurement
  • Bonding wire flow rate calculation
  • Standard void ratio calculation software

For Mass Production

  • 4 steps switching function of resolution(0.6um / 1um / 2um / 3um)
  • Possible to inspect voids, shorts etc. of a few um levels of microbumps with diameters of 20~30um
  • Corresponds to 8 inches / 12 inches sized wafers
  • Supports GEM, Load Port Expansion, OHT types
  • Scale display function, Auto alignment, Auto focus function installed
  • Specifications for clean room with CLASS 100