Atmospheric Pressure Plasma Processing System

• Effective for organic matter removal, surface modification and surface roughening of film and glass substrates
• Suitable for processing finer than corona discharge
• Corresponds to R2R system
• 3 different type of method ~ Direct method / Remote method / Arc Jet metho

Direct Method

Features

• Atmospheric pressure plasma processing system for generating radicals, ions and electrons between a substrate and an electrode and processing it directly.
• It is an effective tool for organic matter removal, surface modification and surface roughening of film and glass substrates.
• It is suitable for porcessing finer than corona discharge.
  +It supports R2R system

Maximum processing width: Up to 2,000mm

Corresponding reaction gas: CDA, N2, Ar, He, O2, CF4 etc.

Remote Method

Features

• Atmospheric pressure plasma processing equipment that generates radicals, electrons and ions at different locations and blows only radicals onto the substrate.
• There is no damage on the electron, ion base materials compare to the direct method.

Maximum processing width: Up to 500mm

Corresponding reaction gas: CDA, N2, Ar, He, O2, CF4 etc.

Arc Jet Method

Features

• It is the optimal method for local processing.
• It is possible to respond to various postings of three-dimensional by using the robot mechanism.
• Spray only the radical component to the target.

Maximum processing width: 10 to 35mm

Corresponding reaction gas: CDA, N2, Ar, He, O2, CF4 etc.