The TM3030Plus has a premium SE detector and a BSE detector which have been incorporated in FE-SEM & VP-SEM and well-accepted by users as a high-sensitivity detector.
The premium SE detector operates effectively under the low-vacuum environment and allows for quick SE image observation without specimen preparation.
Specimen: Ink printed(Uncoated)
SE, 5 kV, Charge-up reduction mode,
Magnification: ×1.0K
TM3030Plus has a premium SE detector which has been incorporated in FE-SEM & VP SEM, and well-accepted by users as a high-sensitivity detector. It can be operated effectively under a low-vacuum environment and allows for quick SE image observation without specimen preparation.
The TM3030Plus allows for effective image analysis with dual signals in one image; displayed as one combined SE signal providing surface rich information and BSE signal for compositional information.
BSE Image
SE Image
Mixing Image
Specimen: Ceramics(Uncoated)
5 kV, Standard mode
Magnification: ×1.0K
The Energy Dispersive X-ray Spectrometer (EDX) for the Hitachi TM3030 series is equipped with the latest SDD (silicon drift detector), a large detection area (30 mm2), and multiple elemental analyses such as point/area analysis, line scan and mapping.
Uncoated sample observation brings seamless operation for the two signals through element mapping.
SE Image
BSE Image
Mapping Image
Specimen: Varistor(Uncoated)
15 kV, Standard mode,
Magnification: ×3.0K
Items | Description |
---|---|
Magnification | ×15 to ×60,000 (Up to ×240,000 with digital zoom) |
Observation condition | 5 kV/15 kV/EDX |
Signal select | BSE/SE/Mix |
Observation mode | BSE:Conductor/Standard/Charge-up Reduction SE:Standard/Charge-up Reduction Mix:Standard/Charge-up Reduction |
Image mode(BSE) | COMPO/Shadow 1/Shadow 2/TOPO |
Sample stage traverse | X: 35.0 mm, Y: 35.0 mm |
Maximum sample size | 70 mm in diameter |
Maximum sample height | 50 mm |
Electron gun | Pre-centered cartridge filament |
Auto image adjustment function | Auto start, Auto focus, Auto brightness/contrast |
Evacuation system (vacuum pump) | Turbomolecular pump: 30 L /s × 1 unit, Diaphragm pump: 1 m3/h × 1 unit |
Dimansions and weight | 330(W) × 606(D) × 565(H) mm, 65.0kg(manual stage) 330(W) × 633(D) × 565(H) mm, 68.0kg(motor drive stage) Diaphragm pump: 145 × 256 × 217mm, 4.5kg |
Surface (5 kV)
Image signal : Mixing
magnification : 40×
EDX (15 kV)
Image signal : Secondary electrons
magnification : 1,000×
Surface (5 kV)
Image signal : Secondary electrons
magnification : 2,500×
Ordinary (15 kV)
Image signal : Backscattered electrons
magnification : 5,000×
Ordinary (15 kV)
Image signal : Secondary electrons
magnification : 20,000×
Ordinary (15 kV)
Image signal : Secondary electrons
magnification : 20,000×
When a filament is blown, changing the filament is rather easy. Remove the filament from the Wehnelt cap and simply attach a new filament assembly. Since the new filament is pre-centered at our factory, no adjustment is necessary. After attaching the filament assembly to the electron gun, it will be necessary to align the beam according to the on-board instructions for beam alignment.
Pre-centered cartridge filament
Wehnelt electrode
Mechanical axis adjustment GUI
This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.