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Hitachi High Technologies in America

Scanning Electron Microscope S-3700N

The S-3700N's huge sample chamber accommodates a variety of samples, while the flexible chamber design affords superior analytical analysis. Capable of accommodating a 300-mm diameter sample with a maximum height of 110 mm. A 5-axis motorized stage makes the large chamber ideal for a wide variety of samples.


The Scanning Electron Microscope (SEM) today is extending into an ever wider field of applications, not only in academic research, but in various industries as well, and associated with this trend, samples requiring observation and analysis also cover a wide spectrum of applications. The S-3700N was developed with these widely diversified applications in mind. In its standard configuration, the S-3700N comes with a secondary electron detector, a five-segment backscattered electron (BSE) detector and a variable pressure (VP) mode.

This allows observation of most samples in their natural state or in a wet condition, without the need for metal coating, which was required in the past with conventional SEM. The S-3700N has a huge sample chamber and can accommodate samples as large as 300 mm in diameter and 110 mm tall. It also has many accessory ports to support the wide range of applications required by today's microscopists, with accessories including, for example, EDX, WDX, EBSD, a Chamber scope, and a cooling stage. This versatile and flexible system will support your needs well into the future.


  • The extra large chamber can accommodate samples up to 300 mm in diameter and EDX/WDX/EBSD accessories simultaneously. It also accommodates samples as tall as 110 mm.
  • A 5-axis motorized stage with eucentric tilt and rotation, an image navigation system, stage history, stage memory and click to center.
  • User-friendly GUI design
  • The display system allows a full-frame, flicker free, high pixel density, real-time image. It also allows simultaneous display of images from two different detectors, each having different sample information, in real-time, including signal mixing.
  • VP mode for observation of non-conductive samples without the need for metal coating.
  • A high sensitivity semiconductor BSE detector that operates in a rapid scan mode. This makes finding areas of interest on large samples easy and convenient.
  • Comes with a Turbo Molecular Pump (TMP) as standard equipment. This minimizes sample contamination due to its clean, dry vacuum conditions. Unlike conventional diffusion pumped SEM, the S-3700N does not require a large heating power or a water re-circulator, making it an energy-saving and ecological SEM.

Application Data


The extra large chamber can accommodate up to a 300 mm diameter sample and EDS/WDS/EBSD accessories simultaneously.

Sample: IC on a printed circuit board
Sample: IC on a printed circuit board

Samples up to 110 mm tall can be accommodated and still achieve an optimal analytical distance for Energy Dispersive Spectroscopy(EDS).

Sample: Grinding disc
Sample: Grinding disc

Materials Science

A complementary use of Low Vacuum SE image with the standard BSE image allows a comparison of two images. BSE images show sample composition while low vacuum SE images show surface topography of a sample closely.

Sample: LLP(Long-lasting Phosphor)
Sample: LLP(Long-lasting Phosphor)

BSE Image

Low Vacuum SE image

Sample: Glass and Fiber Composite

Life Sciences

Cooling stage can be used to image hydrated samples such as biological material, plants, food products and emulsions as the vaporization of water content can be minimized by keeping the sample between 0 to -20°C. It allows observation and analysis of water-containing samples for a few tens of minutes to a couple of hours without causing deformation of samples. This is recommended to observe beam sensitive samples as well.

At an ambient temperature

At an ambient temperature
Sample shrinkage is seen after 10 minutes.

At -20°C (A cooling stage was used.)

At -20°C (A cooling stage was used.)
Sample shrinkage is not seen after 10 minutes.

Sample: Plum petal