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Hitachi

Hitachi High Technologies in America

Tabletop Microscope TM3030Plus

The TM3030Plus has a premium SE detector and a BSE detector which have been incorporated in FE-SEM & VP-SEM and well-accepted by users as a high-sensitivity detector.

The premium SE detector operates effectively under the low-vacuum environment and allows for quick SE image observation without specimen preparation.

Features

Plus1:Newly Innovated Secondary Electron Detector


Specimen: Ink printed(Uncoated)
SE, 5 kV, Charge-up reduction mode,
Magnification: ×1.0K

TM3030Plus has a premium SE detector which has been incorporated in FE-SEM & VP SEM, and well-accepted by users as a high-sensitivity detector. It can be operated effectively under a low-vacuum environment and allows for quick SE image observation without specimen preparation.

Plus2:Unique Compositional Image

The TM3030Plus allows for effective image analysis with dual signals in one image; displayed as one combined SE signal providing surface rich information and BSE signal for compositional information.

BSE Image

SE Image

Mixing Image

Specimen: Ceramics(Uncoated)
5 kV, Standard mode
Magnification: ×1.0K

Plus3:High Throughput EDX and Seamless Operation

The Energy Dispersive X-ray Spectrometer (EDX) for the Hitachi TM3030 series is equipped with the latest SDD (silicon drift detector), a large detection area (30 mm2), and multiple elemental analyses such as point/area analysis, line scan and mapping.

Uncoated sample observation brings seamless operation for the two signals through element mapping.

SE Image

BSE Image

Mapping Image

Specimen: Varistor(Uncoated)
15 kV, Standard mode,
Magnification: ×3.0K

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Option

Specifications

ItemsDescription
Magnification ×15 to ×60,000 (Up to ×240,000 with digital zoom)
Observation condition 5 kV/15 kV/EDX
Signal select BSE/SE/Mix
Observation mode BSE:Conductor/Standard/Charge-up Reduction
SE:Standard/Charge-up Reduction
Mix:Standard/Charge-up Reduction
Image mode(BSE) COMPO/Shadow 1/Shadow 2/TOPO
Sample stage traverse X: 35.0 mm, Y: 35.0 mm
Maximum sample size 70 mm in diameter
Maximum sample height 50 mm
Electron gun Pre-centered cartridge filament
Auto image adjustment function Auto start, Auto focus, Auto brightness/contrast
Evacuation system (vacuum pump) Turbomolecular pump: 30 L /s × 1 unit,
Diaphragm pump: 1 m3/h × 1 unit
Dimansions and weight 330(W) × 606(D) × 565(H) mm, 65.0kg(manual stage)
330(W) × 633(D) × 565(H) mm, 68.0kg(motor drive stage)
Diaphragm pump: 145 × 256 × 217mm, 4.5kg

Application Data

Semiconductors

Magnetic head

Magnetic head
Surface (5 kV)
Image signal : Mixing
magnification : 40×

LSI interconnect

LSI interconnect
EDX (15 kV)
Image signal : Secondary electrons
magnification : 1,000×

Materials Science

Copper crystals

Copper crystals
Surface (5 kV)
Image signal : Secondary electrons
magnification : 2,500×

Fluorescent material

Fluorescent  material
Ordinary (15 kV)
Image signal : Backscattered electrons
magnification : 5,000×

Life Sciences

Butterfly wing

Butterfly wing
Ordinary (15 kV)
Image signal : Secondary electrons
magnification : 20,000×

Stomach medication

Stomach medication
Ordinary (15 kV)
Image signal : Secondary electrons
magnification : 20,000×

Maintenance

Easy electron gun maintenance

When a filament is blown, changing the filament is rather easy. Remove the filament from the Wehnelt cap and simply attach a new filament assembly. Since the new filament is pre-centered at our factory, no adjustment is necessary. After attaching the filament assembly to the electron gun, it will be necessary to align the beam according to the on-board instructions for beam alignment.

Pre-centered cartridge filament
Pre-centered cartridge filament

Wehnelt electrode
Wehnelt electrode

Mechanical axis adjustment GUI
Mechanical axis adjustment GUI