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Hitachi

Hitachi High-Tech in America

Advanced High Voltage CD-SEM “CV6300 Series”

  • CV6300 Series enables measurements of high aspect ratio deep holes and trench bottom dimensions to control the manufacturing of beyond 96 layers 3D NAND flash memory.
  • CV6300 Series enables high speed and high precision overlay measurements for the advanced DRAM and Logic device.

Features

  • CV6300 Series is the advanced in-line measurement system that realized a 45kV acceleration voltage
  • Measurement throughput has been improved by about 25% compared to the previous mode
  • The precision improvement in dimensions and overlay measurements has been achieved, as well as a reduction of measurement variation among systems