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Hitachi Group
Products & Services

Hitachi Group
Corporate Information

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Products & Services
Semiconductor Manufacturing Equipment
Etch, CD-SEM and Defect Inspection Systems
CD-SEM & Defect Inspection
CD-SEM
Advanced High Voltage CD-SEM “CV6300 Series”

Advanced High Voltage CD-SEM “CV6300 Series”

Advanced High Voltage CD-SEM “CV6300 Series”

CV6300 Series enables measurements of high aspect ratio deep holes and trench bottom dimensions to control the manufacturing of beyond 96 layers 3D NAND flash memory.
CV6300 Series enables high speed and high precision overlay measurements for the advanced DRAM and Logic device.

Features

Features

CV6300 Series is the advanced in-line measurement system that realized a 45kV acceleration voltage
Measurement throughput has been improved by about 25% compared to the previous mode
The precision improvement in dimensions and overlay measurements has been achieved, as well as a reduction of measurement variation among systems

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