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Hitachi High-Tech in America

FX Series Cleaning Machine

FX Series Cleaning Machine


Ideal for cleaning in the substrate and disks.
A Disk and Substrate cleaning maching for mass production machine. A high washing ability achieved by multiple washing process, keep disk clean after wash and small footprint.


  • Improve cleaning by multiple wash method.
  • Adopt the high purify dip tank.
  • Adopt the IPA dry method.
  • Applicable high throughput.