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Hitachi High-Tech in America

RecipeDirector / DesignGauge-AnalyzerPlus

Offline automated recipe creation without using a wafer by utilizing design data

Advanced data analysis station for CD-SEM images


  • Utilizing design data on RecipeDirector provides automatic setting of coordinates of addressing points, auto focus point, and measurement cursor boxes without specific know-how
  • This leads to short time recipe creation and improvement in CD-SEM availability

Recipe creating image


  • DesignGauge-AnalyzerPlus is the advanced data analysis station which provides offline post measurement, contour extraction using SEM images and measurement result acquired from CD-SEM

Offline post-measurement and contour extraction