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Hitachi

Hitachi High-Technologies GLOBAL

SEMICON Japan 2018

Invitation to the Hitachi High-Technologies Group Booth « East Hall 5 (5045) »

"Process Plus+Values" The Hitachi High-Technologies Group presents a variety of solutions from the cutting-edge technologies on 300mm wafers to unique applications on 200mm or smaller diameter wafers including new materials such as SiC.

Hitachi High-Technologies Corporation
Hitachi High-Tech Solutions Corporation
Hitachi High-Tech Fielding Corporation
Hitachi High-Tech Fine Systems Corporation

Dates

Dec.12(Wed)~14(Fri) 2018
10:00~17:00

Venue

Admission

Free of charge ,need to registration

Organized by

SEMI

Hitachi High-Technologies Group Booth

East Hall 5th 5045

Exhibitor seminars

Tech SPOT EXHIBITOR SEMINARS

Venue: East Hall 4

Session1:
Challenges and solutions for process control of next generation patterning technologies with using CD-SEM based Edge Placement Error (EPE) metrologies
Date & Time
・13:40 to 14:30 December 12(Wed)
・12:40 to 13:30 December 14(Fri)

Session2:
"Mirelis" for non-destructive inspection of crystal defects and latent scratches in SiC wafers.
Date & Time
・12:40 to 13:30 December 13(Thur)

Products | Booth ≪ East Hall 5 (5045) ≫

IoT・Power Solutions

Cutting Edge Microfabrication Solutions

Off-line Analytical Solutions

Experience corner

  • Hitach Tabletop Microscopes TM4000
    (Reservation on the day _Limited number of people)

Hitach Tabletop Microscopes TM4000
Photo : TM4000 Plus

サポート

THE 高専(KOSEN)

Exhibitions and research presentations of technical college students

MIRAI College @GAKKO

Industry guidance for graduate and undergraduate students (Booth tour, Industry lecture etc)

Floor layout of Tokyo Big Sight

Floor layout of Tokyo Big Sight