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PRODUCT
Single wafer type ion beam etching machine
Product information of Single wafer type ion beam etching machine.

PRODUCT
Batch type ion beam etching machine
Product information of Batch type ion beam etching machine.

PRODUCT
Batch Type Wet Station
Our system has batch type cleaning ,resist stripping and etching potions. All processes from chemical cleaning to dryer are fully automated.

PRODUCT
Spin Processor (MSP-1)
This spin processor is suitable for R&D and small production. All processes from chemical process to dryer are in one cup.

PRODUCT
Multi Spin Processor (MSP-2)
Multi spin processor is suitable for mass production and Multi complex process.

PRODUCT
Ion beam etching machine
Applicable to etching of piezoelectric and magnetic materials for IoT and automotive devices from experiments to mass production.

PRODUCT
MC1000 Ion Sputter Coater
Designed and built to Hitachi’s extraordinary standards, the Hitachi MC1000 Ion Sputter Coater is poised to perform in your lab for years to come.

PRODUCT
Sample Cleaner ZONESEMⅡ
The ZONESEMⅡ Tabletop Sample Cleaner uses UV-based cleaning technology to minimize or eliminate hydrocarbon contamination for electron microscopy imaging.

PRODUCT
LED Thermal Resistance Measuring Equipment
LED thermal resistance measurement by ⊿VF method Can measure LED modules and LED elements by the use of large current ""Rapid response"" ""stability"", ""large current"" of power ⇒ Achieves steady and transition thermal resistance measurement Has a temperature coefficient measurement function (Can make connection with thermostatic bath) With multi-element switching function (maximum 100 ch)

PRODUCT
Roll to Roll Coater
Roll to roll wet coating system (slot die) Two types of dryers available: Compact dryer and Large box enclosed dryer High efficiency drying via hot air and IR installed in the chambers. Super thin to thick film coatings can be covered with our slot die.