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Equipped with polycapillary X-ray focusing optics and a silicon drift detector, FT160 enables high preciseness and high throughput in nano-order level coating thickness measurement of electronic parts.
Accomplishing highly precise measurement by irradiate high-luminance primary x-ray to the area of about 30 μmφ.
High count rate silicon drift detector enables highly precise measurement.
Precise multi-point automatic measurement function helps high efficiencies of the measurement.
Daily routine measurements can be conducted easily by using registered application-like recipe.
Adoption of closed housing greatly minimizes the risk of x-ray leakage.
Wide door design improves visibility of the sample and operability of the instrument.
|Elements||Atomic No. 13(Al) to 92(U)|
|Sample stage (mm)||300(W) × 245(D)||420(W) × 320(D)||620(W) × 620(D)|
|Maximum sample size (mm)||300(X) × 245(Y) × 80(Z)||400(X) × 300(Y) × 100(Z)||600(X) × 600(Y) × 20(Z)|