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Nanoscale Device Characteristics Analysis System Lineup
NP6800 is an SEM-based nano probing system optimized for electrical characterization of 10nm device and beyond. Characteristic evaluation using heating and cooling stage and EBAC analysis are also supported.
NE4000 is an SEM-based probing system developed for electrical characterization of semiconductor devices, materials and electric components as well as for EBAC analysis.
“S.I.navi” is Hitachi Membership Site for analytical instruments users.
“S.I.navi” provides helpful information for daily analysis.