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Hitachi High-Tech in Thailand
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  4. CD-SEM & Defect Inspection
  5. DR-SEM

DR-SEM

Defect and Pattern Evaluation SEM CT1000

Defect and Pattern Evaluation SEM CT1000

Development of G & C devices by 3D observation of defects and pattern shapes Contributes to shortening TAT and improving quality

Defect Review SEM CR7300 Series

Defect Review SEM CR7300 Series

Inline Review SEM which contributes yield enhancement with high speed ADR and accurate ADC