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Hitachi High-Tech in Canada

May 16, 2016

Release of the Variable-Pressure Scanning Electron Microscope, FlexSEM 1000

Compact VP-SEM that fits on a tabletop, while providing drastically enhanced resolution and usability

SCHAUMBURG, Illinois, May 16, 2016 – Hitachi High Technologies America, Inc. has announced the release of a new scanning electron microscope (SEM), Model FlexSEM 1000, in the Americas, making it now available worldwide. The FlexSEM 1000 has been developed as a compact SEM system with a minimized, lab-friendly footprint, while offering the resolution equal to that of conventional, full-sized SEM models', as well as superior ease of use for users of all levels.

SEMs support high-magnification and high-resolution analyses of elements and are utilized for observation of the surface structures of materials for R&D, quality assurance and other many purposes in various industrial fields such as nanotechnology and biotechnology fields. In recent years, the demand for fine surface structure observation has increased and expanded the usage of SEMs to production sites, inspection sites, and offices. This in turn has created a need for a compact instrument which fits in a limited space.

The Main unit of the newly released FlexSEM 1000 has dimensions of 450 mm(W) x 640 mm(D), and is 52% more compact, 45% lighter, and 50% more energy-efficient than the existing model, the SU1510. Also, it only requires a standard wall outlet for power (AC100V 3P). The Main unit can be separated from the Power Supply unit for additional space-saving and flexible system placement.

The FlexSEM 1000 has achieved 4-nm resolution by employing a newly designed electrical optical system and a high-sensitivity detector, normally used in high-end models with proven reliability.

The user interface is easy to operate even by novice users, and with the various automated functions, high-quality and quick data acquisition can be accomplished regardless of user experience levels. Specifically, the new and enhanced navigation function, SEM MAP, helps locate the regions of interest quickly, and delivers accurate correlated optical and SEM images with only one click.

Compact Variable-Pressure SEM FlexSEM 1000
Compact Variable-Pressure SEM FlexSEM 1000
(Main unit and Power Supply unit are separable)

Main Features

  1. Compact design (45 cm wide) with 4 nm resolution
  2. Intuitive user interface enables high-quality, high-throughput imaging regardless of user experience level
  3. Novel navigation function, SEM MAP, for searching an entire field of view and locating regions of interest
  4. Large Area (30mm²) Silicon Drift Detector EDS System for high speed data acquisition*1
  5. Through speeding up automated brightness and focus functions, wait time becomes 1/3 shorter comparing to the conventional products

Main Specifications

Main Specifications
Resolution *2 4.0 nm at 20 kV (SE: High vacuum mode)
15.0 nm at 1 kV (SE: High vacuum mode)
5.0 nm at 20 kV (BSE: Low vacuum mode)
Accelerating voltage 0.3 to 20 kV
Magnification 6 x to 300,000 x (on photo *3)
16 x to 800,000 x (on display *4)
Variable pressure range 6 to 100 Pa
Specimen stage 3-Axis Motorized stage
X: 0 to 40 mm, Y: 0 to 50 mm, Z: 5 to15 mm
R: 360°, T: -15° to +90°
Dimensions & Weight Main unit 450 (W) x 640 (D) x 670 (H) mm
Power Supply unit 450 (W) x 640 (D) x 450 (H) mm
applicable when Main unit and Power Supply unit are connected
at 127 mm x 95 mm (4" x 5" Picture size)
at 509.8 mm x 286.7 mm (1,920 x 1,080, pixels)

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About Hitachi High Technologies America, Inc.

Hitachi High Technologies America, Inc. ("HTA") is a privately-owned global affiliate company that operates within the Hitachi Group Companies. HTA sells and services semiconductor manufacturing equipment, analytical instrumentation, scientific instruments, and bio-related products as well as industrial equipment, electronic devices, and electronic and industrial materials.