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Disk Surface Inspection System NS7000 Series

NS7000 Series Disk Surface Inspection System

A high-precision surface inspection system for substrate and disk featuring a sophisticated defect classification function by laser irradiation of multi dearing and newly developed incline defect method.

Features

  • Detecting minute defect as high sensitivity by defect method.
  • Inspection on the same spindle using multiple optics.
  • Reflectometer and scatterometer method.

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