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  5. LE4000A Exposure System for Large Size Glass Substrate

LE4000A Exposure System for Large Size Glass Substrate

LE4000A Exposure System for Large Size Glass Substrate

A high speed proximity exposure system for volume production of color filter substrate.
System achieves high throughput and high reliability.

Features

  • High throughput
    18sec./plate(except exposure time)
  • High resolution
  • Automatic alignment and proximity gap control
  • Non contact pre-alignment
  • Substrate size
    Max.400mm x 500mm
  • Applicable to inline

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