Skip to main content

Hitachi High-Tech
  1. Home
  2. Products & Services
  3. Semiconductor Manufacturing Equipment
  4. CD-SEM & Defect Inspection
  5. Metrology Solution
  6. Advanced Area Inspection SEM GS1000

Advanced Area Inspection SEM GS1000

Advanced Area Inspection SEM GS1000

For the advanced device production – Large FOV area inspection SEM

Features

  • A new concept inspection and metrology system that combined high-speed wide-area scanning technology with large-current electron beam, and added high-performance processing server.
  • Achieved high-quality-imaging that a high-resolution 80um x 80um wide-range batch image and <0.02% in-image uniformity accuracy by aberration correction and scan distortion correction technology.
  • Multiple process correlation and yield analysis applications are realized by various high-speed massive inspection and metrology using the comparison method between SEM image and design data.
  • A high-speed, advanced process yield management system is planned to develop that integrates artificial intelligence (AI) technology.
-
-

Related Links

Related Information

Contact Us