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On the LSI production line, it is emphasized high-speed defect monitoring by inspecting production wafers’ defects at high frequency without missing DOIs (Defects of Interest). IS Series can perform such monitoring of defects which has occurred on patterned wafers in mass production process at high-speed and high-sensitivity. Furthermore, it features the user-friendly operability of recipe creation and the capabilities of high frequency and high speed inspection of 200mm and 300mm wafers. IS Series contributes to optimizing costs of the defect management and defect inspection of patterned wafer.